What is reactive magnetron sputtering?
What is reactive magnetron sputtering?
Reactive magnetron sputtering is a well-established physical vapor technique to deposit thin compound films on different substrates, ranging from insulating glass windows over wear-resistant car parts to high-responsive touch screens.
What is magnetron sputtering method?
Magnetron sputtering is a high-rate vacuum coating technique that allows the deposition of many types of materials, including metals and ceramics, onto as many types of substrate materials by the use of a specially formed magnetic field applied to a diode sputtering target.
What is RF magnetron sputtering?
RF magnetron sputtering is a technique where Argon ions are accelerated by a RF electric field to hit a target made of the material to sputter.
How do magnets enhance the sputtering rate in magnetron sputtering process?
In the magnetron sputtering process (fig. left), permanent magnets are placed behind the sputtering target to increase the ion density in front of it: The magnetic field forces the free electrons into helical paths around its magnetic lines.
Why is magnetron sputtering better than DC sputtering?
Deposition rate is low compare to DC sputtering. It is used for smaller substrate sizes due to high cost factor of RF power supplies….RF sputtering.
| Features | DC Sputtering | RF Sputtering |
|---|---|---|
| Sputtering rate | 100% of DC | 20% of DC, no magnetron |
| cost and complexity | Best | Very Good |
| Compaign length (i.e. loss of anode) | Good | Excellent |
Why RF sputtering is better than DC sputtering?
Why argon is used for sputtering?
The reason for using argon is that it is necessary to replace oxygen and water vapor in highly reactive air with less reactive gases. Nitrogen and argon are often used as lowly reactive gases. Since nitrogen is reactive at high temperatures, argon gas is often used.
What is the difference between DC sputtering and RF sputtering?
Popular Answers (1) The main difference is that the power used in RF sputtering is AC, while that in DC sputtering is DC. Basically, during DC sputtering, the working gas will be ionized.
https://www.youtube.com/watch?v=R_OqJT62MjU
