How is FinFET made?

In today’s leading-edge technologies, self-aligned double patterning (SADP) and self-aligned quadruple patterning (SAQP) are used to create the fin structure. In these methods, spacers are deposited on the sidewalls of a sacrificial structure, which is later removed by etching.

What is the meaning of fin in FinFET?

FinFET stands for a fin-shaped field-effect transistor. Fin because it has a fin-shaped body – the silicon fin that forms the transistor’s main body distinguishes it.

Who developed FinFET?

In 1999, Chenming Hu crammed a record number of transistors onto a chip with his invention of “FinFET,” short for Fin Field Effect Transistor. The FinFET – named for a vertical fin-like component – takes up less surface area than conventional two-dimensional transistors, allowing engineers to fit more on each chip.

How do FinFET work?

As opposed to a traditional planar transistor, the finFET has an elevated channel or “fin,” which the gate wraps around. Due to their structure, finFETs generate much lower leakage power and allow greater device density. Compared to planar transistors, finFET operate at a lower voltage and offer higher drive current.

How many gates does a FinFET have?

In 2011, Rice University researchers Masoud Rostami and Kartik Mohanram demonstrated that FinFETs can have two electrically independent gates, which gives circuit designers more flexibility to design with efficient, low-power gates.

Why FinFET is used?

FinFET technology provides numerous advantages over bulk CMOS, such as higher drive current for a given transistor footprint, hence higher speed, lower leakage, hence lower power consumption, no random dopant fluctuation, hence better mobility and scaling of the transistor beyond 28nm.

What is the channel of FinFET?

This design is called the FinFET because its Si body resembles the back fin of a fish. In planner CMOS devices, the channel is horizontal while in FinFETs, the channel is vertical. The width of the FinFET is dependent on the height of the Fin.

What is FinFET grid?

A FinFET is a new type of multi-gate 3D transistor that offers significant performance improvements and power reduction compared to existing planar CMOS devices.