What is micro fabrication process?

Microfabrication or MEMS fabrication defines a series of techniques that can modify a substrate material in an additive or subtractive manner to convert a thin, generally planar, substrate into a complex structure of multiple materials through the interaction of microscopic features.

What are the basic micro fabrication techniques?

The most important microfabrication techniques are photolithography, soft lithography, film deposition, etching, and bonding. Photolithography is used to transfer a user-generated shape onto a material through the selective exposure of a light sensitive polymer.

What is fabrication process in MEMS?

MEMs fabrication using LIGA Technique. It is a fabrication technique that involves lithography, electroplating, and molding on a single substrate. LIGA Process. 1st step involves the deposition of a layer of Titanium or copper or Aluminum on the substrate to form a pattern.

Why cleanliness is required in the micro fabrication process?

Cleanliness in wafer fabrication Smoke, dust, bacteria and cells are micrometers in size, and their presence will destroy the functionality of a microfabricated device.

What is a fabrication process?

Let us call a fabrication process everything which is in between the commercially available supply materials (like semiconductor substrate) and a ready-to-use device (ready to turn on by applying the external voltage source). K.V. Galloway, N.M. Sammes, in Encyclopedia of Electrochemical Power Sources, 2009

How are acoustic wave microelectromechanical systems (MEMS) biosensors fabricated?

This review is focused on acoustic wave microelectromechanical systems (MEMS) biosensors that are fabricated using MEMS techniques such as lithography, etching, deposition of thin metal films and sputtering of piezoelectric thin layers.

What do we know about microjet impingement cooling of microelectronics?

Numerous theoretical and numerical computational studies have dealt with microjet impingement cooling of microelectronics ( Boeschoten et al., 2000; Chiriac et al., 2004; Chiriac and Rosales, 2003 ). It should be noted, however, that microjet refers to the size of the jet impinging on the surface, not the overall dimension of the device.